Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling

Title: Real poly(p-phenylene vinylene) features from near-field scanning optical lithography and the implications for further modelling
Creator: Cotton, Daniel V.; Fell, Christopher J.; Belcher, Warwick J.; Dastoor, Paul C.
Relation: Journal of Physics D: Applied Physics Vol. 48, Issue 32
Publisher Link: http://dx.doi.org/10.1088/0022-3727/48/32/325101
Publisher: Institute of Physics
Resource Type: journal article
Date: 2015
Description: Near-field scanning optical lithography (NSOL) has been used to produce ordered structures of the semi-conducting polymer poly(p-phenylene vinylene) at sizes comparable to optical wavelengths. Structures on this scale are of interest for integrated optical devices. Here we study the effect of precursor film thickness upon the size and shape of lithographically produced features. We show that the discrepancies between the predicted and measured structures arise from two key factors: (1) the inherent change in the refractive index of the precursor polymer that occurs during lithography and (2) the considerable length of a precursor polymer relative to the characteristic NSOL feature dimension. Suggestions are made for the improvement of modelling accuracy.
Subject: PPV; NSOL; lithography; NSOM; electroactive polymer
Identifier: http://hdl.handle.net/1959.13/1334852
Identifier: uon:27366
Identifier: ISSN:0022-3727
Language: eng
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